頁籤選單縮合
題名 | 混成材料(AMPS/SiO[feaf])濕度感測器之製備與性能研究=Performance of a Humidity Sensor Prepared by the Hybrid Material of AMPS/SiO[feaf] |
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作 者 | 洪健彰; 鍾財王; 宋隆裕; | 書刊名 | 中原學報 |
卷期 | 30:3 2002.09[民91.09] |
頁次 | 頁269-274 |
分類號 | 440.34 |
關鍵詞 | 濕度感測器; 溶凝膠法; 有機-無機混成; Humidity sensor; Sol-gel process; Organic-inorganic hybrid; |
語文 | 中文(Chinese) |
中文摘要 | 本研究嘗試使用一種有機與無機混成濕度感測材料來製作阻抗式濕度感測器,此一感損則材料利用溶膠凝膠程序將有機材料已|可臨2-甲基丙位積酸與無機材料二氧化矽混成反應而得,之後再利用旋轉塗佈法將此感濕材料塗佈於印有一對梳型電極的氧化鋁基板製得所要的感測原件。混成材料所形成的在穿交錯網路結構具有可增強濕度感測器所需要的抗水性能及縮短偵測所需的反應時間亨特性。經由阻抗分析儀測試後,於250C及1kHz的條件下,感濕特性由25%RH至95%RH可達三個數量級以上;反應時間從 95%RH變化至20%RH 僅需10秒左右。此外,在溫度依數特性僅有0.23RWC-' to 0.37 RHoc-'的影響(由150C至鈞。C) ,遲滯量也在1.5%RH以下O |
英文摘要 | ln this study, the impedance-type humidity sensor was prepared by using an organic-inorganic composite material and the performances were investigated. The 2- acrylamido-2-methyl-propane sulfonic acid (AMPS) was hybridized in the sol-gel process with silica gel (Si02). This hybrid material was coated on the AI203 substrate with interdigited e1ectrodesby using the spin coating method and was used as a sensing material. The interpenetrating polymer network (IPN) structure of the hybrid sensing film could increase the water-resistance and decre ase the response time (1 Os from 95% to 20% RH) for this device. The impedance varied more than three orders of the magnitude in the range of 25-95% RH under 1kHz and 250C condition. The temperature dependence is 0.23 RHoCI to 0.37 RHoCI for the temperature of 150C to 550C, respectively, and the hysteresis is below 1.5%RH. |
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