頁籤選單縮合
| 題 名 | Study of Flow and Pressure Distribution within the Standard Mechanical Interface Enclosure |
|---|---|
| 作 者 | Ma,Rong-hua; Horng,Chuen-chyi; Sheu,Tsung-sheng; | 書刊名 | 黃埔學報 |
| 卷 期 | 42 2002.03[民91.03] |
| 頁 次 | 頁497-511+513-530 |
| 分類號 | 440.137 |
| 關鍵詞 | Mini-environment; SMIF enclosure; Air flow field; Air cleanliness; |
| 語 文 | 英文(English) |
| 英文摘要 | The application of mini-environment and SMIF (standard mechanical interface) enclosure in the cleanroom can efficiently reduce airborne particles and isolate the personnel from the product. The purpose of this article is to analyze the airflow field and pressure distribution of SMIF enclosure and to investigate the air cleanliness inside the mini-environment. Based on the continuity," momentum and energy equations of airflow motion, the simulation code CFX will be used to study the flow field of air movement corresponding to the associated boundary conditions. The results show that proper drilling holes or slots can improve the circulation zones of SMIF enclosure. The positive pressure of SMIF enclosure is mainly affected by inlet air flux, area of outlets, and leakage area. The calculated results will provide the design rules for SMIF Robot inside the SMIF enclosure and reduce the particle accumulation during robot moving. |
本系統中英文摘要資訊取自各篇刊載內容。