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題 名 | 半導體集束型設備之遠端監控/診斷系統的架構開發=Design and Development of Remote Monitoring and Diagnosing System for Semiconductor Cluster-Tools Equipment |
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作 者 | 鍾文仁; 呂國璋; 呂學治; 林子維; 游欽宏; 洪建中; | 書刊名 | 中原學報 |
卷 期 | 32:3 2004.09[民93.09] |
頁 次 | 頁329-341 |
分類號 | 448.94 |
關鍵詞 | 集束型設備; 遠端監控; 電子診斷; Cluster-tools equipment; E-diagnostics; Remote monitoring; |
語 文 | 中文(Chinese) |
中文摘要 | 本研究以三層式的架構為基礎,實際建立一個具網路遠端監控功能之半導體集束型設備晶圓輸送平台的遠端監控/診斷系統,以透過網際網路的方式來操作機械手臂的運作、監控晶圓輸送的程序;通過核准的使用者可以利用網頁瀏覽器在任何地方來進行機械手臂及設備運作的診斷、控制,並以視訊攝影機(CCDCamera)監視即時的設備運本系統以VisualStudio.NET為開發工具,使用的程式語言包含ASP.NET 、C#(Sharp)及ECMAScript等;並以TCP/IP的通訊協定進行客戶端、伺服端及設備端伺服器 的通訊溝通;以RS-232的通訊協定進行設備端伺服器與設備的通訊溝通;以SOAP(Simple Object Access Protocol)通訊協定來進行客戶端與網頁伺服器之間的資料傳送;以SQLServer 2000來記錄與回應設備的訊息資料;以GDI+2D繪圖函式庫建構設備應 用伺服器之虛擬設備的作動模擬;以CCDCamera進行遠端設備的監視;以SVG (Scalable Vector Graphics)圓形進行客戶端的虛擬設備作動模擬。 |
英文摘要 | On the basis of three-tier application (software) archite cture this study develops a remote monitoring and diagnosing system (RMDS) for semiconductor c1uster-toolsequipment in order to control robot and monitor wafer-transport procedures remotely via Internet. The three-tier architecture of this system is described as: Client End, Server End, and Equipment End. With this system, through web browser anywhere, the approved c1ientuser can diagnose/ control the operation of equipment and monitor the field real time frame from web CCD camera to achieve e-Diagnostics capabilities. In three-tier system ofthis study, which is based on Microsoft .NET platform, Microsoft Visual Studio .NET development tool is used to build system applications. In addition, the applied programming languages in c1ude ASP.NET,C# (C-Sharp), and ECMAScript. TCP/IP protocol is used to communicate between server end and c1ientend. RS-232 protocol is used to communicate between equipment application server and equipment devices. SOAP (Simple Object Access Protocol) protocol is used to deliver data between c1ientend and web application server. GDI+ 2D graphics is applied to simulate virtual equipment at equipment application server. SVG (Scalable Vector Graphics) graphics is applied to simulate virtual equipment at c1ientend. CCD camera is applied to monitor field equipment remotely. |
本系統中英文摘要資訊取自各篇刊載內容。