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題 名:
Evaluation of Hindrance to the Growth of SiN Passivation Layer by Contamination of Fluoride Ions in Front Opening Unified Pod (FOUP):
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作 者:
Song, Gil Joo;
Hwang, Sung Min;
Koo, Soo Jong;
Kim, Hyoung Ryeun;
Jang, Hee Chang;
Hong, Jeong Hoon;
Park, Hyun Yul;
Choi, Euiji;
Kim, Jin Young;
Noh, Tae Yong;
Lee, Eungsun;
Yoo, Seoung-kyo;
- 書刊名:
Aerosol and Air Quality Research
- 卷 期:
15:5 2015.10[民104.10]
- 頁 次:
頁2175-2183
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被引用次數:期刊(0) 博士論文(0) 專書(0) 專書論文(0)
排除自我引用:0
共同引用:0
點閱:0
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題 名:
Influence of Fluoride Ions Contamination in Front Opening Unified Pod (FOUP) Generating Defective Bonding Pad:
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作 者:
Kwon, Soon Seok;
Hwang, Sung Min;
Kim, Hyoung Ryeun;
Jang, Hee Chang;
Hong, Jeong Hoon;
Song, Gil Joo;
Park, Hyun Yul;
Kim, Minsoo;
Shin, Youhwan;
Kim, Jin Young;
Noh, Tae Yong;
Yoo, Seoung-Kyo;
- 書刊名:
Aerosol and Air Quality Research
- 卷 期:
17:3 2017.03[民106.03]
- 頁 次:
頁936-941
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被引用次數:期刊(0) 博士論文(0) 專書(0) 專書論文(0)
排除自我引用:0
共同引用:0
點閱:0