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題 名:
Hydroquinone Oriented Growth Control to Achieve High-quality Copper Coating at High Rate for Electronics Interconnection:
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作者:
Zheng, Li
Wang, Chong
Cai, Deng'an
Huang, Yunzhong
Adi, Kegu
Hong, Yan
Chen, Yuanming
Zhou, Guoyun
Armini, Silvia
De Gendt, Stefan
Wang, Shouxu
He, Wei
- 書刊名:
Journal of the Taiwan Institute of Chemical Engineers
- 卷 期:
112 2020.07[民109.07]
- 頁 次:
頁130-136
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被引用次數:期刊(0) 博士論文(0) 專書(0) 專書論文(0)
排除自我引用:0
共同引用:0
點閱:0
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題 名:
Investigation of Polyvinylpyrrolidone as an Inhibitor for Trench Super-filling of Cobalt Electrodeposition:
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作者:
Ni, Xiuren
Chen, Yuanming
Jin, Xiaofeng
Wang, Chong
Huang, Yunzhong
Hong, Yan
Su, Xinhong
Zhou, Guoyun
Wang, Shouxu
He, Wei
Chen, Qingguo
- 書刊名:
Journal of the Taiwan Institute of Chemical Engineers
- 卷 期:
112 2020.07[民109.07]
- 頁 次:
頁232-239
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被引用次數:期刊(0) 博士論文(0) 專書(0) 專書論文(0)
排除自我引用:0
共同引用:0
點閱:0