頁籤選單縮合
題名 | The Design of Microstructures for Multifunctional Pulse Measurements= |
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作者 | Chang, Hsing-cheng; Lin, Chih-yuh; Chiu, Chung-chien; Lai, Chi-chih; Huang, Sy-ruen; Wang, Chi-ling; Chang, Yung-hsien; Lin, Young-chun; |
期刊 | 醫學工程 |
出版日期 | 19991200 |
卷期 | 11:6 民88.12 |
頁次 | 頁333-337 |
分類號 | 410.1644 |
語文 | eng |
關鍵詞 | Microstructures; Multifunctional pulse measurement; Contact-type microsensor; |
英文摘要 | Four sets of bridge-type contact-force microstructures have been designed in a 6mm × 6.5mm × 0.5mm silicon die for mutifunctional pulse measurements. Two wafers are used to design sensing elements and force transmission structures separately that are bonded directly by the anodic-bonding technique. The microsensing elements are piezoresistive membrane with hihg sensitivity. The microstructures with backside contact design makes only the contact membrane exposed to the environment that improves measurement-induced pollution and electrical damage problems. The device's stressstrain distribution, sensitivity, and the linearity characteristic are simulated and analyzed by the finite- element method. The results provide design constrains to the microsensing structures. The proposed contact-force micro-sensing structures, provide multiple information at single measuring point, can be used to integrate with a signal-processing unit for human pulse measurements. |
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