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題名 | Effect of an Inclined Susceptor on the Transport Phenomena in a Horizontal Atmospheric CVD Reactor=水平式化學蒸鍍反應器內傾斜基板對輸送現象影響之探討 |
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作者 | 朱智瑋; 李克強; | 書刊名 | Journal of the Chinese Institute of Chemical Engineers |
卷期 | 29:2 1998.03[民87.03] |
頁次 | 頁109-120 |
分類號 | 460.026 |
關鍵詞 | 水平式化學蒸鍍反應器; 傾斜基板; 輸送現象; CVD reator; Indined susceptor; Simulation; |
語文 | 英文(English) |
中文摘要 | 本研究採用數值模擬以分析水平冷壁式化學蒸鍍反應器內之氣體流場,溫度場 ,及濃度場。對流所產生之渦流為探討之主體。不同傾斜角之基板產生不同大小及形態之 渦流,影響質傳現象,進而影響蒸鍍膜之均勻度。本研究發現傾斜基板可增進薄膜均勻度 。 |
英文摘要 | We perform a numerical simulation of the gas flow pattern, and the temperature and concentration distributions in a horizontal cold wall atmospheric CVD reactor with an adjustable tilt angle of the susceptor. The effects of mixed convection on heat and species transport are also examined in the range 2< Re < 10 and 600 K < susceptor temperature < 1200 K. We find when the inertia force is maintained constant, the transverse rolls increase the vertical temperature gradient and decrease the vertical mass fraction gradient above the horizontal susceptor. On the other hand, the tilt angle arrangement enlarges the concentration gradient along the trailing edge of the susceptor. Consequently, the uniformity of growth rate is increased. The effects on the flow fields due to the tilt angle configuration and various thermal boundary conditions of the susceptor are also explored. |
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