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題名 | EPD法披覆玻璃絕緣層於PZT積層致動器微細電極=Deposition of Glass Insulation Layers Onto Fine Electrodes of PZT Multilayer Actuator Via Electrophoretic Technique |
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作者 | 洪永泰; 駱榮富; 胡榮章; 謝志文; 杜順利; Hong, T. Y.; Louh, R. F.; Hu, L. J.; Hsieh, C. W.; Tu, S. L.; |
期刊 | 材料科學 |
出版日期 | 19970300 |
卷期 | 29:1 1997.03[民86.03] |
頁次 | 頁49-55 |
分類號 | 440.33 |
語文 | chi |
關鍵詞 | 電泳披覆法; PZT積層致動器; Zn-B-Si-O玻璃絕緣層; Electrophoretic deposition; EPD; PZT multilayer actuator; Zn-B-Si-O glass insulation layers; Termination; |
中文摘要 | 積層型壓電致動器可應用於製作許多自動控制之機電元件,因其具有耗電量低、 應答速度快、轉換效率高、小型化和輕量化、不產生電磁信號干擾等電子特性,故其工業應 用範圍大,各工業發達國家亦均積極努力於壓電致動器的開發工作。 在乙酸乙酯與異丙醇溶液中添加 50 μ l 之氫氧化四甲胺 (TMAH) 與 200 μ l 之硝化纖 維素溶液 (NC) 可得高披覆效率的電泳懸浮液。 在 660 ℃下完成的燒結電泳披覆 Zn-B-Si-O 玻璃絕緣層的寬度在 80-100 μ m 之間,高度約在 25-35 μ m 的範圍。 經過 熱分析機械性質分析與壓電電性分析所獲得結果顯示,以電泳披覆法製作積層型壓電致動器 電極表面絕層的緻密性、附著性以及電器絕緣性效果良好,合乎未來各種工業應用產品使用 需求條件。 |
英文摘要 | Multilayer piezoelectric actuators are used as primarily important components for automation control and precision machinery industries due to many merits such as low power consumption, fast response, high energy transfer efficiency, high step resolution, light weight and miniaturization, and resistance to electromagnetic interference. Electrophoretic deposition (EPD) technique is employed for the novel termination process of multilayer Pb(Zr �� Ti �� )O �� (PZT) actuators, which is associated with sereral advantages in cluding simrle process low apparatus cost, fine and complex shape deposition patterns, and fast deposition rates for both oxide and non-oxide films. Addition of 50 μ l tetramethylammonium hydroxide (TMAH) and 2000 μ l nitrocellulose (NC) as well as fine Zn-B-Si-O glass powder (3.2-4.5 μ m)in ethyl acetate and isopropyl alcohol (IPA) solution is formulated to be a stable suspension with high deposition efficiency for EPD process. Electrophoretically deposited glass insulation layer onto fine Ag-Pd inner electrodes of PZT multilayer actuator was sintered at 650-660 ℃ for 15 min. Dense insulation layers with dimension of 80-100 μ m width by 25-35 μ m height can be obtained by control of deposition parameters. Sintered glass insulation layers have shown good adhesion and high electrical resistance. SEM and EDS analysis also showed that the thin insulation layer made by EPD method had excellent coverage and free from pinholes and defects. Thermal analysis (DSC/TMA) verified that Zn-B-Si-O insulator had good thermal compatibility with the Ag-Pd inner electrodes to ensure long service life of multilayer actuators. The piezoelectric characteristics of PZT multilayer actuator associated with the EPD process is well retained. The EPD method demonstrated here suggests that it is an economic and viable technique for the termination process of the multilayer structure of similar electrical components. |
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