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題名 | 三極式離子幫浦陰極材料的研究=Study on the Cathode Material of a Triode Ion Pump |
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作者 | 劉遠中; 唐自雄; 熊高鈺; 陳俊榮; Liu, Y. C.; Tang, C. S.; Hsiung, G. Y.; Chen, J. R.; |
期刊 | 真空科技 |
出版日期 | 19991200 |
卷期 | 12:4 1999.12[民88.12] |
頁次 | 頁11-15 |
分類號 | 339.4 |
語文 | chi |
關鍵詞 | 三極式離子幫浦; 陰極材料; |
中文摘要 | 本文研究了三極式離子幫浦陰極材料的抽氣機制。實驗中採用三種不同的陰極材 料(鋁、鈦以及不�袗�)、測量H 、N 和Ar等三種不同氣體的抽氣速率。實驗結果發現, 鈦陰極材料具有最高的H 抽氣速率,而鋁陰極材料具有最卜的N 和A 抽氣速率。從抽 氣速率測量,以及對陰極材料進行彈性回散射偵測法(ERD)的分析結果,認為鋁陰極材料對 H 的抽氣和表面層的吸附狀態有關。 |
英文摘要 | The pumping mechanism of a triode ion pump with different cathodes (A1, Ti and stainless steel) was investigated by comparing the pumping speed for different gases (H , N and Ar). It was observed that the H pumping with Ti-cathode has the highest pumping speed. However, the pumping speed for N and Ar are the highest in the cases with A1-cathode. Results obtained from the pumping speed measurements and the elastic recoil detection (ERD) method on cathodes were analyzed. It is noted that the H pumping mechanism of A1 cathode might be due to the pumping in surface layer. |
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