頁籤選單縮合
題 名 | Investigation of Polyvinylpyrrolidone as an Inhibitor for Trench Super-filling of Cobalt Electrodeposition |
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作 者 | Ni, Xiuren; Chen, Yuanming; Jin, Xiaofeng; Wang, Chong; Huang, Yunzhong; Hong, Yan; Su, Xinhong; Zhou, Guoyun; Wang, Shouxu; He, Wei; Chen, Qingguo; | 書刊名 | Journal of the Taiwan Institute of Chemical Engineers |
卷 期 | 112 2020.07[民109.07] |
頁 次 | 頁232-239 |
分類號 | 460.02 |
關鍵詞 | Cobalt electrodeposition; Suppressor; Trench filling; |
語 文 | 英文(English) |