查詢結果分析
來源資料
頁籤選單縮合
題 名 | 微機電元件的雜訊考量=Noise Considerations of MEMS Devices |
---|---|
作 者 | 劉茂誠; 王竣傑; | 書刊名 | 奈米通訊 |
卷 期 | 19:3 2012.09[民101.09] |
頁 次 | 頁34-37 |
分類號 | 448.57 |
關鍵詞 | 微機電; 熱雜訊; 閃爍雜訊; 寄生效應; MEMS; Thermal noise; Flicker noise; Parasitic effect; |
語 文 | 中文(Chinese) |
中文摘要 | 本篇以等效模型做為微機電結構的設計要點,而微機電元件以半導體材料為主,因此有熱雜訊、閃爍雜訊與寄生效應。微機電元件在設計初期,皆考量微機電元件的機械特性,卻忽略電子模型。當設計機械結構,應同時考量電子等效模型,再由電子模型考量半導體製程的製作步驟,與每一層材料的製程方式,以達到微機電元件的最佳性能。 |
英文摘要 | The design point of this paper is focused on the equivalent models of MEMS structures. There are thermal noise, flicker noise, and parasitic effect in the models because the semiconductor materials are used for MEMS components. The MEMS components in the design process are needed to consider about the mechanical properties, but the electronic equivalent models are ignored. The mechanical structures of the design are needed to concern about the electronic equivalent models, and then the design is also needed to consider about the process steps of the semiconductor manufacturing and the materials of each layer of the process from the point of the equivalent models. |
本系統中英文摘要資訊取自各篇刊載內容。