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題名 | 全像光柵式奈米解析面內位移感測器=Holographic Displacement Sensor for the Sub-Nanometer Resolution Displacement Measurement |
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作者 | 黃貫中; 高孟群; 許正治; Huang, Kuan-chung; Kao, Meng-chun; Hsu, Cheng-chih; |
期刊 | 光學工程 |
出版日期 | 20121200 |
卷期 | 120 2012.12[民101.12] |
頁次 | 頁13-18 |
分類號 | 448.5 |
語文 | chi |
關鍵詞 | 位移感測器; 外差干涉術; 全像片; 繞射光柵; Displacement sensor; Heterodyne interferometer; Holographic plate; Diffracted beam; |
中文摘要 | 本文結合全像光柵和外差干涉術達成奈米等級面內位移感測,利用外差相位解析技術分析±1階繞射光的干涉訊號,量測光柵位移量。實驗結果顯示,當使用壓電位移驅動器時,可以觀察到4 pm的面內位移變動;並根據誤差分析,本技術的靈敏度和誤差量分別為0.5 pm和0.0165 nm。由於使用全像光柵作為位移檢測,本研究也量測光柵週期隨溫度變化,並求出全相片之熱膨脹係數為1.375×10^(-5)/℃。當溫度變化在1℃以內,由光柵週期改變量小於0.02 nm。 |
英文摘要 | In this paper, we develop and demonstrate a displacement sensor comprised of a holographic plate integrated with a heterodyne interferometer. The holographic displacement sensor is mounted on the motorized stage and two diffracted lights will diffract and propagate on the x-z plane for x-direction displacement measurement. Based on the optical configuration, the p-polarized light coming from the +1st order diffracted beam will interfere with the s-polarized light coming from the -1st order diffracted beam. Similarly, the p-polarized light coming from the -1st order diffracted beam will interfere with the s-polarized light coming from the +1st order diffracted beam. This being a true phase detection heterodyne interferometer, the displacement can be obtained by analyzing of these two interference signals. The results show a 4 pm displacement variation of the PZT actuator can be observed. The theoretical sensitivity and the uncertainty can reach to 0.5 pm and 0.0165 nm, respectively. Furthermore, the expansion coefficient of the hologram has determined with measured the diffraction angle changed as the temperature changed. The expansion coefficient is about 1.375×10^(-5)/℃ and the grating pitch variation is smaller than 0.02 nm as the temperature variation within ±1℃. |
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