頁籤選單縮合
題名 | Development of a Novel Multi-axis Nano-positioning and the Spiral Tracking Control= |
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作者 | 覺文郁; 沈金鐘; 鄭友仁; 劉建宏; 鄧雲峰; 簡裕特; 王鴻澍; Jywe, Wen-yuh; Shen, Jing-chung; Jeng, Yeau-ren; Liu, Chien-hung; Teng, Yun-feng; Jian, Yu-te; Wang, Hung-shu; |
期刊 | 中國機械工程學刊 |
出版日期 | 20090800 |
卷期 | 30:4 2009.08[民98.08] |
頁次 | 頁343-350 |
分類號 | 446.8401 |
語文 | eng |
關鍵詞 | 多軸奈米定位平臺; 微定位平臺; 循圓軌跡; Piezoelectric; Hystersis; Capacitance sensor; Sliding-mode control; Precision stage; |
中文摘要 | 本篇論文中藉由材料具有撓曲的特性,設計一創新多自由度奈米級微定位平台,並以壓電致動器作為驅動器以取代傳統的驅動方式,其平台內部並設計多組高解析度電容式探頭,針對微定位平台進行位移的檢測,而在控制器設計分面則採用順滑控制設計,針對於微動平台內部的壓電致動器進行遲滯建模與補償,使其微定位平台能做到3D曲線循跡,並且循圓軌跡精度可達到4奈米。 |
英文摘要 | This paper presents the design of a sliding-mode controller for a piezoelectric-driven nanometer resolution stage. The nanometer resolution stage is developed using the features of a flexible structure, and is driven by piezoelectric actuators and also uses capacitance sensors for position feedback. The hysteresis characteristic of the piezoelectric actuators is one of the major deficiencies in a wide variety of precise tracking positioning controls. In order to design the control system, the open-loop characteristics of this nanometer resolution stage are investigated. According to the open-loop characteristics, each pair of piezoelectric actuator and capacitance sensor is treated as an independent system and modeled as a first order linear model coupled with hysteresis. When the model is identified, the hysteresis nonlinearity is linearized then the linear system model with uncertainty is used to design the controller. When designing the controller, the sliding-mode disturbance estimation and compensation scheme is used. The structure of the proposed controller is similar to the PID controller. Thus, it can be easily implemented. |
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