頁籤選單縮合
題名 | InGaAs線型短波紅外取像模組=Linear InGaAs SWIR Image Sensing Wodule |
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作者 | 林群富; 吳孟修; 蔡和霖; 黃泰綸; 黃哲政; 周世傑; Lin, Chun-fu; Wu, Meng-hsiu; Tsay, Ho-lin; Huang, Tai-lun; Huang, Che-cheng; Jou, Shyh-jye; |
期刊 | 科儀新知 |
出版日期 | 20070400 |
卷期 | 28:5=157 2007.04[民96.04] |
頁次 | 頁57-64 |
分類號 | 448.59 |
語文 | chi |
關鍵詞 | 線型短波紅外取像模組; InGaAs; |
中文摘要 | 紅外線影像對熱源具有高敏感度等特性,可應用於晶圓缺陷檢測、軟性電路板缺陷檢測等等,因此紅外線取像系統為自動光學檢測 (AOI) 之關鍵零組件。本研究以 InGaAs 線型短波紅外感測器作為基礎,發展線型短波紅外取像模組。電子電路系統以模組之觀念進行設計規劃,經電路設計製作、韌體程式撰寫、軟體程式撰寫、軟硬體整合測試,完成整體模組之製作。本 InGaAs 線型短波紅外取像模組係經由光電參數量測,取得系統之光譜響應,搭配鏡頭及對焦工作,實際進行取像。 |
英文摘要 | The image of infrared rays is provided with high sensitivity to thermo-object. It could be applied to defect detection of flexible printed circuit board and defect detection of wafer. As a result, infrared rays image grabbing system is a key component in the region of automatic optical inspection (AOI). The research is based on the InGaAs short-wave detector to develop linear short-wave infrared rays module. The concept of module is described to coding of firmware and software and the integration testing of software and hardware, the module is finished and presented. The spectral response is obtained by measuring of optic-electrical parameter with the InGaAs short-wave infrared rays module. After completed with lens and focusing, the object image of infrared rays is proceeding. |
本系統之摘要資訊系依該期刊論文摘要之資訊為主。