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題名 | 渦輪分子真空泵浦轉子葉片分子動力學之最佳化設計與製作研究=A Study of Optimal Design and Manufacture of a Turbo Molecular Pump Rotor Blade for Molecular Dynamics |
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作者 | 許智能; 蔣小偉; 傅英嘉; 徐國勛; 黎兆桓; 戴暐城; Hsu, Chih-neng; Chiang, D. Hsiao-wei; Fu, Ying-chia; Hsu, Kuo-hsun; Li, Chao-huan; Tai, Wei-cheng; |
期刊 | 真空科技 |
出版日期 | 20111200 |
卷期 | 24:4 2011.12[民100.12] |
頁次 | 頁8-16 |
分類號 | 446.74 |
語文 | chi |
關鍵詞 | 渦輪分子真空泵浦; 自由分子流; 分子動力學; 轉子葉片; Turbo molecular pump; Free molecular flow; Molecular dynamics; Rotor blade; |
中文摘要 | 渦輪分子真空泵浦 (Turbo Molecular Pump) 是在高真空狀態下運轉的真空泵浦,其流動之 氣體已屬於自由分子流,分析時不可使用黏性流計算。因此本研究將發展一套分析模組作為渦輪分子真空泵浦轉子葉片分子動力學之最佳化設計與製作研究能量,並提出完整分析流程之方法供設計研發,以及建構單級和多級葉片之性能分析。本研究主要以轉子葉片分子動力學之最佳化設計與製作研究為目的,藉由稀薄氣體分子流所形成之高真空狀態設計葉片的幾何形狀,並再進行加工製作成型的研究。所以應用分子動力學觀念建立二維及三維葉片分析程式,再設計葉輪之幾何參數,其包含葉片長度、厚度、轉速、單級和多級葉片數,然後再進行葉片加工製作,以及轉子動平衡,並做模態分析與測試驗證,系統漏氣率真空度平臺性能測試等研究。本研究方法與致揚科技公司合作研發真空泵浦所建構之最佳化設計、分析、製作及改良葉片已達成設計目標。 |
英文摘要 | Turbo molecular pump (TMP) is a kind of vacuum pump that operates under high vacuum.The gas fl ow is a free molecular fl ow state, so the analysis approach can not be used the viscous flow mode. Therefore, the research and development molecular dynamics for a turbo molecular pump rotor blade analysis module as the optimal design and manufacture base energy, and that provide a full analysis fl ow chart approach for design and development in single- and multi-stage blade performance analysis. In this study, molecular dynamics of the rotor blade optimal design and manufacture for the purpose of research. The fl ow fi eld is a rarefi ed gas fl ow by the formation of high vacuum state design blade geometry shape, and then manufacture molding research. Therefore, molecular dynamics concepts to create 2D and 3D blade analysis program, and then design blade round of the geometric parameters, include blade length, thickness, rotating speed, blade number, blade manufacture, rotor balancing, vibration modal analysis and testing, system assembly leakage rate testing. The research approach have been established the optimal design, analysis, manufacture,and modify blade to achieve design goals. |
本系統之摘要資訊系依該期刊論文摘要之資訊為主。