頁籤選單縮合
題 名 | Reflection Property of Nano-Acoustic-Waves at Interface=奈米音波之介面反射特性 |
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作 者 | 謝佳龍; | 書刊名 | 光學工程 |
卷 期 | 89 民94.03 |
頁 次 | 頁67-77 |
分類號 | 448.59 |
關鍵詞 | 壓電換能器; 奈米; 聲波; 表面探測; 同調聲學聲子; 氮化鎵; Piezoelectric transducer; Nanometer; Acoustic wave; Surface detection; Coherent acoustic phonon; GaN; |
語 文 | 英文(English) |
中文摘要 | 本篇論文利用光壓電換能器產生奈米波長的音波。所產生的奈米音波首次應用在高解析度表面不平整偵測,其解析度達次奈米等級。論文中也應用奈米音波之相位反射特性,設計並實現新型奈米壓電換能器,可提升輸出功率。 |
英文摘要 | We have used optical piezoelectric transducers to generate acoustic waves with nanometer acoustic wavelength and demonstrated the high-resolution surface detection with initiated nano-acoustic waves. The depth resolution reached sub-nanometer which is equal to the most accurate atomic force microscope, one of the most widely used surface detection equipments. In addition, we demonstrated a novel designed structure of nano-piezoelectric transducer by means of the phase characteristic of reflected nano-acoustic waves. Compared with traditional piezoelectric transducers, this novel transducer structure enhances the acoustic output power. |
本系統中英文摘要資訊取自各篇刊載內容。