頁籤選單縮合
題名 | Structural Characterization of TiAl-doped DLC Coatings by Raman Spectroscopy and X-ray Photoelectron Spectroscopy= |
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作者 | Chang, Chi-lung; Jao, Jui-yun; Chang, Tang-chun; Ho, Wei-yu; Wang, Da-yung; |
期刊 | 明道學術論壇 |
出版日期 | 20050900 |
卷期 | 1:1 民94.09 |
頁次 | 頁115-124 |
分類號 | 472.15 |
語文 | eng |
關鍵詞 | |
英文摘要 | In this work, the combinations of TiAl-doped diamond-like carbon (DLC) and TiAlN/TiN double-layered films were designed to deposit on the tool steels using cathodic arc evaporation in a single process. The economic advantage in depositing the combined coating in one production scale PVD coating system is of practical importance. The TiAl-doped DLC as lubricant coatings were synthesized with TiAl-target arc sources to emit ion plasma to activate acetylene (C2H2) reactive gases. Scanning electron microscopy (SEM), micro-Raman spectroscopy, X-ray photoelectron spectroscopy (XPS) techniques were employed to analysis the microstructure properties of TiAl-doped DLC coatings. Vicker's hardness tester was used to measure the mechanical properties of TiAl-doped DLC coatings. The results show that the microhardness of TiAl-doped DLC coatings was dependent on the ratio of I(subscript D)/I(subscript G) and sp^3/sp^2, which higher sp^3/sp^2 ratio or lower I(subscript D)/I(subscript G) ratio with higher hardness value. |
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