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題名 | 微波電漿增進脈衝雷射製作釔鋇銅氧高溫超導薄膜之研究= |
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作者 | 鍾炳中; 蔡春鴻; 徐商祥; 黃金石; 曾俊元; 林諭男; |
期刊 | 材料科學 |
出版日期 | 19950900 |
卷期 | 27:3 1995.09[民84.09] |
頁次 | 頁227-236 |
分類號 | 440.33 |
語文 | chi |
關鍵詞 | 超導性; 薄膜; 微波電漿; Superconductivity; Thin film; YBCO; PE-PLD; Microwave plasma; |
中文摘要 | 以微波電漿來增進脈衝雷射鍍膜(PE-PLD)之技術已成功臨場製作出高 品質的釔鋇銅氧超導薄膜,較傳統PLD法大大的改善了薄膜的表面品質,產生極 緻密、如鏡面的平整表面。比超導薄膜形成在(100)MgO基板上,具有c軸垂直表 面,且a-,b-軸在薄膜平面上彼此完全對準近似磊晶的排列,其臨界溫度為Tc=86 °K。由PE-PLD電漿之放射光譜發現有大量的活性氧原子產生,且YBCO個別粒 子之光譜強度都有顯著的增強,並維持至基板表面,其基板至靶材距離為85mm, 較一般PLD鍍膜距離為長,顯示出雷射噴柱在氧的微波電漿下被再激發,這些現 象可用來解釋鍍膜動力和表面形態增進的原因。 |
英文摘要 | Microwave plasma enhanced pulsed laser deposition (PE-PLD) technique has successfully in-situ synthesized the high quality Y�湎a�浚u�記�f-x superconducting thin films. Comparing to the conventional PLD processes, the PE-PLD process has remarkably improved thesurface morphology of grown films producing high dense and mirror-smooth surface.Epitaxial-like superconducting films (Tc=86°K) with c-axis perpendicular to the filmsurface and with a- and b- axes perfectly aligned in the film plane were obtained on(100)MgO substrate. The substrate to target distance in PE-PLD process was extended to85mm longer than that in conventional PLD process. The PE-PLD emission spectrashowed abundant active atomic oxygen produced and greatly enhanced the emissionintensities of laser plume species sustaining to the substrate surface, indicating that theplume was re-excited by the microwave oxygen plasma, that is believed to explain theimprovement of deposition kinetics and surface morphology of YBCO superconducting thinfilms. |
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