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題名 | 應用氧化鋅鎵透明導電膜與反射式電極來改善GaN發光二極體光取出效率=Ga-doped ZnO Transparent Conductive Oxide Films with Reflective Electrode Pads Applied to GaN-based Light Emitting Diodes for Improving Light Extraction Efficiency |
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作者 | 杜尚儒; 藍成均; 李明倫; 張國華; 許進恭; 洪逸修; 呂彥興; 徐國偉; 賴韋志; Tu, S. J.; Lan, C. J.; Lee, M. L.; Chang, K. H.; Sheu, J. K.; Hung, I-hsiu; Lu, Y. S.; Shu, K. W.; Lai, W. C.; |
期刊 | 真空科技 |
出版日期 | 20110300 |
卷期 | 24:1 2011.03[民100.03] |
頁次 | 頁51-59 |
分類號 | 448.552 |
語文 | chi |
關鍵詞 | 氧化鋅; 發光二極體; 透明導電薄膜; 磁控濺鍍機; Zinc oxide; Light emitting diode; Transparent conducting layer; Sputter; |
中文摘要 | 儘管在傳統氮化鎵的LED 元件上,使用氧化銦錫 (Indium Tin Oxide, ITO) 薄膜來當作透明導電層 (Transparent Contact Layer, TCL) 是一種廣為大家所接受的技術;但利用氧化鋅 鎵 (Ga-doped ZnO, GZO) 來當 TCL 薄膜,因其折射率 (n=2) 相對於 ITO 薄膜 (n=1.7) 較高,比 ITO 薄膜有較佳出光的改善;預期再經過粗化 GZO 表面將會表現出另外的優勢。對於一個使用粗化 GZO 搭配 ITO 組成複合式的透明導電層之發光二極體 (LED-C),與分別使用平面 GZO 薄膜來當作 TCL 發光二極體 (LED-A)、平面 ITO 和 GZO 組成複合式的透明導電層(LED-B) 相比之下,分別約 42% 和 48% 的提升 LED 光輸出功率。此外,LED 元件還可藉由 非合金(Non-Alloyed) 的Ag/Cr/Au 反射式電極鍍在粗化GZO 薄膜,相較於Cr/Au 金屬電極鍍在平面 GZO 薄膜上,在注入 20 mA 電流條件下,光輸出功率可以有 30% 明顯提升。 |
英文摘要 | Although the utilization of indium tin oxide (ITO) serving as the transparent contact layer (TCL)in conventional GaN-based light emitting diodes (LEDs) is a well accepted technology, ZnO-based TCLs with a high refractive index of around 2.0 would render another advantage when a roughening process is performed on the surface. The light output power of an LED (LED-C) with a textured ITO/GZO composite TCL is markedly improved by 42 % and 48 % of magnitude as compared to LEDs with a planar GZO TCL (LED-A) and a ITO/GZO composite TCL (LED-B), respectively. GaNbased light-emitting diode (LED) with non-alloyed metal contacts and textured Ga-doped ZnO (GZO).Compared with the conventional LEDs with fl at surface and Cr/Au metal contacts, the non-alloyedAg/Cr/Au contacts used in the present experimental LEDs play the role of refl ector to prevent the emitted light from absorption by the opaque electrode pads. The output power of experimental LEDs can be improved markedly by a magnitude of 30% compared with conventional LEDs. |
本系統之摘要資訊系依該期刊論文摘要之資訊為主。