頁籤選單縮合
題名 | 奈米級摩擦式驅動精密定位機構=A Friction Drive Micropositioning Mechanism with Nanometer Resolution |
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作者 | 張所鋐; 李昇憲; Chang, Shuo-hung; Li, S. S.; |
期刊 | 國立臺灣大學工程學刊 |
出版日期 | 19990600 |
卷期 | 76 1999.06[民88.06] |
頁次 | 頁51-65 |
分類號 | 446.8401 |
語文 | chi |
關鍵詞 | 摩擦驅動; 奈米級解析度; 壓電致動器; Friction drive; Nanometer resolution; Piezo-actuator; |
中文摘要 | 本文報告一種利用摩擦滯滑現象,及積層式壓電致動器所推動之長距 離精細位移,設計成之精密定位機構,並建立運動之數學模式,分別以傳統摩擦 模型,Karnopp摩擦模型及重置積分模型,模擬定位機構之動態行為,數值計算 顯示Karnopp模型最適合本定位機構之實況;又經實驗量測,確認7.5奈米之位 移解析度,適合高精度定位儀器之應用。 |
英文摘要 | This paper reports the design and performance of a multi-layer piezodriven friction drive micropositioning mechanism capable of long distance travel. The design is accompanied with parametric analysis using a mathematical model that includes the traditional friction, Karnopp friction and reset integrator models. Numerical results illustrate the Karnopp model fits the physical reality in this study. Experimental measurements show a 7.5 nanometer resolution of the proposed micropositioner. It's applicable for high precision instruments. |
本系統之摘要資訊系依該期刊論文摘要之資訊為主。